TransSECS Recipe Management

When you don't have a full FAB host there are still problems that ErgoTech's TransSECS can help you resolve. The most pressing is usually ensuring that the correct recipe is run at the tool. If you lot follower has the recipe as a barcode. A simple solution, such as the one below can be provided to you by ErgoTech very econimically - typically cost of only a few scrapped wafers. And, because it's build with ErgoTech's extensible tools, it can be extended later to include automatic start, data collection, MES/Database Lot lookups, APC, almost anything you could want for supervisory control.

TransSECS at the tool